Thin Film Deposition & Thermal Treatment
| Thin film deposition | Furnace |
 201403_Rens 201403_Kitano |
Five Targets Ultra High Vacuume rf Sputtering System | |
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 [manual] |
Single Target rf Sputtering System (SPF-210HS, Anelva) | |
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 [manual] |
Single Target rf Sputtering System (SPF-210?, Anelva) | |
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Laser Ablation and Three Targets Sputtering System | |
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[manual] |
Vacuum Deposition | |
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Record book Vacuum Deposition |
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[manual] |
Atomic Layer Deposition | |
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[manual] |
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[manual] |
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[manual] |
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[manual] |
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[manual] |
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[manual] |
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Contact:
Prof. Minoru FUJII
Department of Electrical and Electronic Engineering, Graduate School of
Engineering, Kobe University
Rokkodai, Nada, Kobe 657-8501, Japan
