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Organic device fabrication system (ULVAC) Sputtering Chamber Pretreatment Chamber Organic Chamber Electrode Chamber Glovebox (from the left side) |
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RF magnetron sputtering system (home-built) Gas: Ar, O2 Cathode: 3 inch Target: InGaZnO, ITO, metals,... |
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Vacuum evaporator (1) Main pump: TMP Source materials: organic |
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Vacuum evaporator (2) Main pump: DP Source materials: metals |
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Vacuum evaporator (3) Main pump: DP Source materials: organic |
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Vacuum sublimation purification furnace (home-built) |
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Mask aligner (Mikasa) Resolution: ～2 micron Lamp wavelength: broadband (g, h, i-lines, 436, 405, 365 nm) |
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Glovebox system (mBRAUN) |
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Scanning electron microscope Acceleration voltage: 2kV, 17 kV Maximum magnification: 100k |
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Atomic force microscope (SII) |
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Parameter analyzer (Agilent) |
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Probing setup for current-voltage measurement |
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Equipment